Finite element modeling of resonant microelectromechanical structures for sensing applications

A general purpose consistent finite element method is developed for the direct numerical solution of small amplitude vibrations of crystal structures which are superposed on a static biasing state. The techniques discussed are applied to the modeling of resonant micro structures for sensing applications. The use of such structures is widespread in the development of microelectromechanical systems (MEMS) such as accelerometers, pressure and force sensors, temperature sensors, and resonant strain gauges. Numerical examples of some these structures are considered employing flexural vibration modes in devices constructed from silicon and quartz