Title :
A MEMS-based multi-sensor platform for consumer applications
Author :
Alandry, Boris ; Mailly, Frederick ; Latorre, Laurent ; Nouet, Pascal
Author_Institution :
LIRMM, Univ. Montpellier II, Montpellier, France
Abstract :
This paper introduces an original MEMS multi-sensor platform for consumer applications. The whole set of sensors have been designed. manufactured and tested showing interesting performances for various type of applications. A demonstrator of a 3D orientation determination system has also been programmed on the platform proving the interest of such device.
Keywords :
micromechanical devices; sensor fusion; 3D orientation determination system; MEMS multisensor platform; consumer application; Accelerometers; CMOS technology; Costs; Magnetic sensors; Manufacturing; Micromechanical devices; Microphones; Packaging; Sensor systems; Testing;
Conference_Titel :
Research in Microelectronics and Electronics, 2009. PRIME 2009. Ph.D.
Conference_Location :
Cork
Print_ISBN :
978-1-4244-3733-7
Electronic_ISBN :
978-1-4244-3734-4
DOI :
10.1109/RME.2009.5201361
