A Methodology for Measuring, Reporting, Navigating, and Analyzing Overall Equipment Productivity (OEP)

This paper will focus on a proposal for a methodology, namely the fab overall equipment productivity (OEP) X-factor Contribution Box (FOX BOXcopy). Based on overall equipment efficiency (OEE) which is already widely in use in the semiconductor industry, the pivotal data analysis tool in this methodology is a two-dimensional, easily comprehensible visualization interface from which the user could readily discern which quadrant each toolset (or equipment) in the fab belongs to, what the extent of its OEP´s deviation from plan is, and hence finally and most importantly which tools provide the most scope for improving the fab´s X-factor (and hence, cycle time).