Title :
Lowering Cost of Ownership through Predictive Maintenance
Author :
Conley, Christopher ; Mootz, Daniel D.
Author_Institution :
Nikon Precision Inc., Belmont
Abstract :
The use of predictive maintenance can return significant gains in total tool cost of ownership (COO) through reductions in parts usage and storage, unscheduled downtime, and maintenance time.
Keywords :
cost reduction; maintenance engineering; photolithography; production equipment; reliability; cost-of-ownership; maintenance time; photolithography equipment; predictive maintenance; reliability centered maintenance; unscheduled downtime; Costs; Electric variables measurement; Job shop scheduling; Life estimation; Lithography; Manufacturing; Mechanical variables measurement; Predictive maintenance; Predictive models; Solids;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI
Conference_Location :
Stresa
Print_ISBN :
1-4244-0652-8
Electronic_ISBN :
1-4244-0653-6
DOI :
10.1109/ASMC.2007.375056
