DocumentCode
2921959
Title
Lowering Cost of Ownership through Predictive Maintenance
Author
Conley, Christopher ; Mootz, Daniel D.
Author_Institution
Nikon Precision Inc., Belmont
fYear
2007
fDate
11-12 June 2007
Firstpage
313
Lastpage
319
Abstract
The use of predictive maintenance can return significant gains in total tool cost of ownership (COO) through reductions in parts usage and storage, unscheduled downtime, and maintenance time.
Keywords
cost reduction; maintenance engineering; photolithography; production equipment; reliability; cost-of-ownership; maintenance time; photolithography equipment; predictive maintenance; reliability centered maintenance; unscheduled downtime; Costs; Electric variables measurement; Job shop scheduling; Life estimation; Lithography; Manufacturing; Mechanical variables measurement; Predictive maintenance; Predictive models; Solids;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI
Conference_Location
Stresa
Print_ISBN
1-4244-0652-8
Electronic_ISBN
1-4244-0653-6
Type
conf
DOI
10.1109/ASMC.2007.375056
Filename
4259222
Link To Document