• DocumentCode
    2922094
  • Title

    Advanced On-The-Fly Method with Correction of Initial Values to Characterize Negative Bias Temperature Instability Reliability

  • Author

    Benard, Christelle ; Ogier, Jean-Luc ; Goguenheim, Didier

  • Author_Institution
    ST Microelectron., Zone Ind. Rousset, Rousset
  • fYear
    2008
  • fDate
    12-16 Oct. 2008
  • Firstpage
    12
  • Lastpage
    15
  • Abstract
    This paper presents a new on-the-fly (OTF) method in order to evaluate the effective threshold voltage (VT) shift without relaxation effects during negative bias temperature instability (NBTI) stresses on pMOSFETs. This method, called OTF_CIV, for on-the-fly with correction of initial values, allows us also to estimate the initial current at stress voltage, which is impossible to measure with an Agilent 4156 parameter analyzer due to the minimum measurement time.
  • Keywords
    MOSFET; semiconductor device reliability; initial value correction; negative bias temperature instability reliability; on-the-fly method; pMOSFET; threshold voltage shift; Current measurement; MOSFETs; Monitoring; Negative bias temperature instability; Niobium compounds; Stress measurement; Testing; Threshold voltage; Time measurement; Titanium compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report, 2008. IRW 2008. IEEE International
  • Conference_Location
    S. Lake Tahoe, CA
  • ISSN
    1930-8841
  • Print_ISBN
    978-1-4244-2194-7
  • Electronic_ISBN
    1930-8841
  • Type

    conf

  • DOI
    10.1109/IRWS.2008.4796076
  • Filename
    4796076