DocumentCode
2922094
Title
Advanced On-The-Fly Method with Correction of Initial Values to Characterize Negative Bias Temperature Instability Reliability
Author
Benard, Christelle ; Ogier, Jean-Luc ; Goguenheim, Didier
Author_Institution
ST Microelectron., Zone Ind. Rousset, Rousset
fYear
2008
fDate
12-16 Oct. 2008
Firstpage
12
Lastpage
15
Abstract
This paper presents a new on-the-fly (OTF) method in order to evaluate the effective threshold voltage (VT) shift without relaxation effects during negative bias temperature instability (NBTI) stresses on pMOSFETs. This method, called OTF_CIV, for on-the-fly with correction of initial values, allows us also to estimate the initial current at stress voltage, which is impossible to measure with an Agilent 4156 parameter analyzer due to the minimum measurement time.
Keywords
MOSFET; semiconductor device reliability; initial value correction; negative bias temperature instability reliability; on-the-fly method; pMOSFET; threshold voltage shift; Current measurement; MOSFETs; Monitoring; Negative bias temperature instability; Niobium compounds; Stress measurement; Testing; Threshold voltage; Time measurement; Titanium compounds;
fLanguage
English
Publisher
ieee
Conference_Titel
Integrated Reliability Workshop Final Report, 2008. IRW 2008. IEEE International
Conference_Location
S. Lake Tahoe, CA
ISSN
1930-8841
Print_ISBN
978-1-4244-2194-7
Electronic_ISBN
1930-8841
Type
conf
DOI
10.1109/IRWS.2008.4796076
Filename
4796076
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