Title :
UV laser excitation of broadband surface acoustic wave pulses in silicon near the ablation threshold
Author :
Kolomenskii, A.A. ; Hess, P.
fDate :
Oct. 31 1994-Nov. 3 1994
Abstract :
The excitation of Rayleigh-type Surface Acoustic Waves (SAW) excited by nanosecond laser pulses at the wavelength of 355 nm is investigated. The dependence of SAW pulse amplitude on laser fluence is measured. The special features connected with surface melting and transition from thermoelastic to ablative excitation mechanism are studied. The ablation threshold is determined experimentally by changes in the SAW signal for successive laser shots on the same spot. It is shown that for the efficient repetitive excitation of broadband SAW pulses on the same spot laser intensities somewhat below the ablation threshold are the most appropriate
Keywords :
Rayleigh waves; acoustic materials; elemental semiconductors; laser ablation; laser beam effects; melting; silicon; 355 nm; Rayleigh-type SAW; Si; UV laser excitation; ablation threshold; ablative excitation mechanism; broadband SAW pulses; broadband surface acoustic wave pulses; efficient repetitive excitation; laser fluence; laser intensities; nanosecond laser pulses; surface melting; Ablation; Laser radiation effects; Silicon materials/devices; Surface acoustic wave materials; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1994.401730
