Title :
BAW composite resonator spectroscopy
fDate :
Oct. 31 1994-Nov. 3 1994
Abstract :
A review of some results and possibilities of recently developed simple method for measurement of bulk acoustic wave attenuation and velocity in thin layers and films is presented. The method is based on frequency measurements of positions of resonant peculiarities of phase and amplitude of electromagnetic wave reflection coefficient from composite resonator structure including the investigated layer. The method provides an absolute attenuation measurement ranged from parts to hundreds of decibels per centimeter with accuracy up to 10-2 and absolute velocity measurement with accuracy 10-4 in a wide frequency band, using the same sample
Keywords :
acoustic resonators; acoustic wave absorption; acoustic wave velocity measurement; bulk acoustic wave devices; BAW composite resonator; absolute attenuation measurement; absolute velocity measurement; bulk acoustic wave attenuation; bulk acoustic wave velocity; electromagnetic wave reflection coefficient; resonant amplitude peculiarities; resonant phase peculiarities; Acoustic resonators; Acoustic velocity measurement; Bulk acoustic wave devices;
Conference_Titel :
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location :
Cannes, France
Print_ISBN :
0-7803-2012-3
DOI :
10.1109/ULTSYM.1994.401731
