High Fidelity Simulation Models for Accurate Equipment Performance Prediction

As semiconductor devices become more complex due to miniaturization and more integrated functions, the assembly and test manufacturing (ATM) processes and equipment become more complex as well. Predicting equipment capacity is no longer trivial, leading to the need for high fidelity dynamic equipment simulation models. This paper describes an approach to develop and apply high fidelity simulation models. Three case studies with different levels of model abstraction based on high-fidelity approach are discussed.