• DocumentCode
    2922179
  • Title

    Balanced Machine Workload Dispatching Scheme for Wafer Fab

  • Author

    Ham, Myoungsoo ; Fowler, John W.

  • Author_Institution
    Arizona State Univ., Tempe
  • fYear
    2007
  • fDate
    11-12 June 2007
  • Firstpage
    390
  • Lastpage
    395
  • Abstract
    A fab-wide dispatching scheme called balanced machine workload (BMW) which considers K-machine look ahead and J-machine look back is proposed. This research is motivated by the minimum inventory variability scheduling (MIVS) policy which considers the inventories at the next K-steps and the previous J-steps. Instead of looking at the fab flow from the step viewpoint, the BMW dispatching scheme looks at it from the machine viewpoint. The proposed dispatching scheme checks the workload of K-downstream machines and J-upstream machines for multiple products where K and J are dynamically calculated based on the current line status. Simulation results demonstrate the superior performance of the BMW dispatching scheme over MIVS.
  • Keywords
    dispatching; integrated circuit manufacture; scheduling; semiconductor technology; J-machine look back; K-machine look ahead; balanced machine workload dispatching; minimum inventory variability scheduling; wafer fabrication; Dispatching; Feeds; Fluctuations; Inventory management; Job shop scheduling; Manufacturing; Personnel; Throughput; Time measurement; Wet etching; Dispatching; Fab; Scheduling; Workload;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI
  • Conference_Location
    Stresa
  • Print_ISBN
    1-4244-0652-8
  • Electronic_ISBN
    1-4244-0653-6
  • Type

    conf

  • DOI
    10.1109/ASMC.2007.375069
  • Filename
    4259235