Reducing Time-to-Respond in a Modern Manufacturing Environment

Author

Van Roijen, R. ; Collins, C. ; Ayala, J. ; Barker, K. ; Boiselle, H. ; Catlett, S. ; Dezfulian, K. ; Logan, R. ; Maxson, J. ; Ramachandran, R. ; Rawlins, B. ; Ruegsegger, S. ; Rust, T. ; Shepard, J. ; Singh, R.

Author_Institution

IBM Syst. & Technol. Group, Hopewell Junction

fYear

2007

fDate

11-12 June 2007

Firstpage

29

Lastpage

33

Abstract

The complexity of modern manufacturing processes has sharply increased the number of steps affecting device and circuit performance. We discuss a number of critical steps, their control methodology and how to minimize the time to detect. Product test results and data-mining are used to identify critical steps and to determine which inline signals require most attention. The last section is devoted to optimizing the analysis of inline electrical signals and their application to tool control.

Keywords

data mining; process control; semiconductor device manufacture; semiconductor device testing; data-mining; manufacturing process control; product testing; semiconductor device manufacture; time-to-respond; Circuit optimization; Circuit testing; Implants; Manufacturing automation; Manufacturing processes; Microelectronics; Rapid thermal annealing; Signal analysis; Signal processing; Temperature control; 300mm manufacturing; Manufacturing automation; Process control; SOI;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI

Conference_Location

Stresa

Print_ISBN

1-4244-0652-8

Electronic_ISBN

1-4244-0653-6

Type

conf

DOI

10.1109/ASMC.2007.375075

Filename

4259241