Title :
General introduction to micromachining
Author_Institution :
Dept. of Mech. Eng., Surrey Univ., Guildford, UK
Abstract :
This paper will introduce some basic micromachining technology. Photolithography, in different forms, is a key part of silicon, LIGA, and Excimer (ultraviolet) Laser micromachining. Some basic techniques and structures that can be produced by silicon micromachining will be discussed, as well as simple sensing and actuation methods. Diamond sawing and turning will be briefly mentioned, as well as problems associated with microdevice assembly and packaging
Keywords :
micromachining; LIGA; Si; actuation; diamond sawing; diamond turning; microdevice assembly; micromachining; packaging; photolithography; sensing; silicon; ultraviolet excimer laser;
Conference_Titel :
Microengineering Technologies and How to Exploit Them (Digest No: 1997/076), IEE Colloquium on
Conference_Location :
Birmingham
DOI :
10.1049/ic:19970427
