Title :
Optical MEMS based on silicon-on-insulator (SOI) for monolithic microoptics
Author :
Noell, Wilfried ; Sun, Winston ; De Rooij, Nico ; Herzig, Hans Peter ; Manzardo, Omar ; Dändliker, René
Author_Institution :
Inst. of Microtechnology, Neuchatel Univ., Switzerland
Abstract :
Microelectromechanical systems (MEMS) combined with optical components add optical functionality to devices and lead to the terms optical MEMS or MOEMS. The underlying technology of the presented devices is silicon-on-insulator (SOI) based batch fabrication, which delivers small, reliable and lasting monolithic bulk silicon structures for commercial devices with the advantage of being very insensitive to temperature changes. The particular strength of the technology is monolithic horizontal and vertical micromirrors for a variety of applications.
Keywords :
integrated optics; micro-optics; micromachining; micromirrors; optical attenuators; silicon-on-insulator; MOEMS; SOI based batch fabrication; Si-SiO2; microelectromechanical systems; micromachining; monolithic bulk silicon structures; monolithic horizontal micromirrors; monolithic microoptics; monolithic vertical micromirrors; optical MEMS; optical functionality; temperature change insensitivity; variable optical attenuator; Micromechanical devices; Microoptics; Optical attenuators; Optical devices; Optical filters; Optical pumping; Optical refraction; Optical sensors; Optical variables control; Silicon on insulator technology;
Conference_Titel :
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7500-9
DOI :
10.1109/LEOS.2002.1159440
