DocumentCode
292269
Title
Finite element modeling of an ultrasonic capacitive transducer
Author
Adamowski, Julio C. ; Silva, Emilio C N ; Simon, Claudio ; Buiochi, Flávio ; Higuti, Ricardo T.
Volume
2
fYear
1994
fDate
Oct. 31 1994-Nov. 3 1994
Firstpage
1261
Abstract
A model for an ultrasonic capacitive transducer based on the finite element method has been proposed in order to allow in depth study of the central frequency, the frequency bandwidth and the transduction efficiency. The involved electrical and mechanical phenomena and their coupling by the electrostatic force are discussed. This model considers the air inside the grooves, the shape and size of the grooves, the mechanical tension applied to the membrane, and its mass and elasticity. The model was implemented using the ANSYS software
Keywords
acoustoelectric transducers; capacitance measurement; finite element analysis; ultrasonic transducers; ANSYS software; central frequency; electromechanical phenomena; electrostatic force; finite element modeling; frequency bandwidth; grooves; mechanical tension; transduction efficiency; ultrasonic capacitive transducer; Acoustoelectric transducers; Capacitance transducers; Finite element methods;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1994. Proceedings., 1994 IEEE
Conference_Location
Cannes, France
Print_ISBN
0-7803-2012-3
Type
conf
DOI
10.1109/ULTSYM.1994.401813
Filename
401813
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