DocumentCode :
2922859
Title :
Discussion Group (DG) summary: Dielectric Electrical Characterization
Author :
Young, Chadwin ; Southwick, Richard
Author_Institution :
SEMATECH. tel: 518-956-7421; e-mail: chadwin.young@SEMATECH.org
fYear :
2008
fDate :
12-16 Oct. 2008
Firstpage :
152
Lastpage :
152
Keywords :
Breakdown voltage; Capacitance-voltage characteristics; Current measurement; Dielectric substrates; Electric variables measurement; High K dielectric materials; High-K gate dielectrics; Probes; Pulse measurements; Stress;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Integrated Reliability Workshop Final Report, 2008. IRW 2008. IEEE International
Conference_Location :
South lake Tahoe, CA, USA
ISSN :
1930-8841
Print_ISBN :
978-1-4244-2194-7
Electronic_ISBN :
1930-8841
Type :
conf
DOI :
10.1109/IRWS.2008.4796116
Filename :
4796116
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2922859
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