DocumentCode
2922914
Title
Applications of focused ion beams in microscale fabrication
Author
Walker, John F.
Author_Institution
FEI Europe Ltd., Cambridge, UK
fYear
1997
fDate
35528
Firstpage
42461
Abstract
Focused ion beam (FIB) systems have achieved great acceptance in prototype modification and process analysis and control. However, a tool capable of milling with sub-micron precision, imaging with sub-10 nm resolution and capable of being interfaced with other analysis techniques has opened the doors to a large range of applications for device prototyping and manufacture
Keywords
micromachining; focused ion beam milling; microscale fabrication;
fLanguage
English
Publisher
iet
Conference_Titel
Microengineering Technologies and How to Exploit Them (Digest No: 1997/076), IEE Colloquium on
Conference_Location
Birmingham
Type
conf
DOI
10.1049/ic:19970430
Filename
640896
Link To Document