• DocumentCode
    2922970
  • Title

    Total Recovery of Defects Generated by Negative Bias Temperature Instability (NBTI)

  • Author

    Benard, Christelle ; Ogier, Jean-Luc ; Goguenheim, Didier

  • Author_Institution
    ST Microelectronics, Rousset; CNRS, Institut Matériaux, Microélectronique et Nanosciences de Provence (IM2NP, UMR 6242)
  • fYear
    2008
  • fDate
    12-16 Oct. 2008
  • Firstpage
    0
  • Lastpage
    18
  • Keywords
    Annealing; Charge measurement; Current measurement; Density measurement; Interface states; Negative bias temperature instability; Niobium compounds; Thermal stresses; Thickness measurement; Titanium compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report, 2008. IRW 2008. IEEE International
  • Conference_Location
    South lake Tahoe, CA, USA
  • ISSN
    1930-8841
  • Print_ISBN
    978-1-4244-2194-7
  • Electronic_ISBN
    1930-8841
  • Type

    conf

  • DOI
    10.1109/IRWS.2008.4796121
  • Filename
    4796121
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2922970