Title :
Impact of Oxygen Vacancies Profile and Fringe Effect on Leakage Current Instability of Ta2O5 MIM Capacitors
Author :
Martinez, V. ; Besset, C. ; Monsieur, F. ; Montès, L. ; Ghibaudo, G.
Author_Institution :
STMicroelectronics, Crolles, France; IMEP-LAHC, INP Grenoble MINATEC, France. vincent.martinez@st.com
Keywords :
Leakage current; Oxygen;
Conference_Titel :
Integrated Reliability Workshop Final Report, 2008. IRW 2008. IEEE International
Conference_Location :
South lake Tahoe, CA, USA
Print_ISBN :
978-1-4244-2194-7
Electronic_ISBN :
1930-8841
DOI :
10.1109/IRWS.2008.4796124
