Title :
Multivariate Statistical Control of Product Test Data and Yield
Author :
Spitzlsperger, Gerhard ; Frick, Matthias ; Leonardelli, Georg ; Rathei, Dieter
Author_Institution :
Renesas Semicond. Eur. (Landshut) GmbH, Landshut
Abstract :
We report about a feasibility study regarding multivariate test data monitoring. Since electrical test data (e.g. wafer sort data) consist often of dozens of correlated parameters, the application of a multivariate yield control concept seems to be intriguing. We will evaluate the concept and discuss advantages and disadvantages of this method.
Keywords :
process monitoring; semiconductor device manufacture; statistical process control; electrical test data; manufacturing control; multivariate statistical control; multivariate test data monitoring; multivariate yield control concept; product test data; semiconductor manufacturing; yield monitoring; Condition monitoring; Control systems; Principal component analysis; Pulp manufacturing; Scattering parameters; Semiconductor device manufacture; Semiconductor device testing; Software testing; Statistical analysis; Statistics; Electrical Test Data; Multivariate Statistics; Yield Monitoring; Yield control;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI
Conference_Location :
Stresa
Print_ISBN :
1-4244-0652-8
Electronic_ISBN :
1-4244-0653-6
DOI :
10.1109/ASMC.2007.375120
