Title :
Proceedings. IEEE Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots(Cat. No.92CH3093-2)
Abstract :
The following topics are dealt with: microvalves; micropumps; bonding; beam-induced microstructure deposition; micromotors; microrobots; high-aspect-ratio structures; machine design; lithography; submicron mechanical structures; etching; epitaxial growth; micronozzle fabrication; activators; microgravity; and electromechanical devices
Keywords :
electric actuators; electric sensing devices; micromechanical devices; activators; beam-induced microstructure deposition; bonding; electromechanical devices; epitaxial growth; etching; high-aspect-ratio structures; lithography; machine design; microgravity; micromotors; micronozzle fabrication; micropumps; microrobots; microvalves; submicron mechanical structures;
Conference_Titel :
Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE
Conference_Location :
Travemunde, Germany
Print_ISBN :
0-7803-0497-7
DOI :
10.1109/MEMSYS.1992.187680
