A new electrostatic actuator providing improved stroke length and force

Author

Branebjerg, Jens ; Gravesen, Peter

Author_Institution

Danfoss A/S, Nordborg, Denmark

fYear

1992

fDate

4-7 Feb 1992

Firstpage

6

Lastpage

11

Abstract

The electrostatic actuator considered consists of a silicon membrane bonded to a glass plate by anodic bonding. On the glass plate a circular gold electrode is made and a thin oxide layer is grown on the silicon membrane before bonding. A pressure is applied to the cavity between the membrane and the glass plate causing the membrane to deflect away from the electrode. When a voltage is applied between the gold electrode and the membrane, high electrostatic forces acting along the membrane periphery will pull the membrane into contact with the glass plate. Experimental results are presented demonstrating a stroke length of 18 μm working against a pressure of 2200 Pa using a voltage of 41 V. The actuator performance has in addition been investigated by means of mathematical analysis and numerical simulations, and a model relating the principal design parameters is presented

Keywords

electric actuators; electrostatic devices; membranes; micromechanical devices; silicon; valves; 2200 Pa; 41 V; Al-SiO₂-Si-Au; Si membrane; anodic bonding; circular Au electrode; design parameters; electrostatic actuator; glass plate; high electrostatic forces; micromachined valve; model; numerical simulations; stroke length; Biomembranes; Bonding; Electrodes; Electrostatic actuators; Glass; Gold; Mathematical analysis; Numerical simulation; Silicon; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE

Conference_Location

Travemunde

Print_ISBN

0-7803-0497-7

Type

conf

DOI

10.1109/MEMSYS.1992.187682

Filename

187682