Pumping of water solutions in microfabricated electrohydrodynamic systems

A microfabricated electrohydrodynamic pump without moving parts driven by low voltages with high-frequency traveling waves is presented. Micron-size scale systems without moving parts fabricated in planar silicon technology are presented and quantitatively described. The operating principle to pump water and weak electrolyte solutions is outlined. It is shown that conductive liquids such as water solutions can be pumped opposite to the direction of the traveling wave. Typical parameters characterizing the advantages and limitations of the pumping principle are discussed. Opportunities for optimization of the micropump in terms of further miniaturization and an increased number of electrodes are noted