Title :
Quantitative reliability assessment of Plasma Induced Damage on product wafers with fast WLR measurements
Author :
Martin, Andreas ; Bukethal, Christoph ; Rydén, Karl-Henrik ; Baier, Sascha ; Schwerd, Markus
Keywords :
Current measurement; Degradation; Electron traps; Leakage current; Life testing; MOS devices; MOSFETs; Plasma measurements; Stress measurement; Threshold voltage;
Conference_Titel :
Integrated Reliability Workshop Final Report, 2008. IRW 2008. IEEE International
Conference_Location :
South lake Tahoe, CA, USA
Print_ISBN :
978-1-4244-2194-7
Electronic_ISBN :
1930-8841
DOI :
10.1109/IRWS.2008.4796138
