Title :
Towards Understanding Negative Bias Temperature Instability
Author_Institution :
Christian Doppler Laboratory for TCAD in Microelectronics, Institute for Microelectronics, TU Vienna, GuÃ\x9fhausstraÃ\x9fe 27-29, A-1040 Wien, Austria
Keywords :
Current measurement; Delay; MOSFETs; Microelectronics; Negative bias temperature instability; Niobium compounds; Particle measurements; Stress measurement; Threshold voltage; Titanium compounds;
Conference_Titel :
Integrated Reliability Workshop Final Report, 2008. IRW 2008. IEEE International
Conference_Location :
South lake Tahoe, CA, USA
Print_ISBN :
978-1-4244-2194-7
Electronic_ISBN :
1930-8841
DOI :
10.1109/IRWS.2008.4796147