Development of an electrostatic actuator exceeding 10 N propulsive force

Author

Niino, Toshiki ; Egawa, Saku ; Nishiguchi, Noboru ; Higuchi, Toshiro

Author_Institution

Dept. of Precision Machinery Eng., Tokyo Univ., Japan

fYear

1992

fDate

4-7 Feb 1992

Firstpage

122

Lastpage

127

Abstract

The actuator developed consists of a stack of ten thin actuators previously developed by the authors. The stacked actuator is 120 mm×110 mm×5 mm in overall size and 70 g in weight. It is equipped with a position sensor with an 80-μm resolution and embedded in a closed-loop control, improving speed and power performance by a factor of about two, reaching top values of 16 cm/s and 1.2 W of mechanical power. The maximum values of force/weight and power/weight ratio of the stacked actuator are 290 N/kg and 17 W/kg, respectively. A propulsive force of 21 N has been achieved with a ±1000-V excitation voltage

Keywords

closed loop systems; electric actuators; electrostatic devices; micromechanical devices; active slider; closed-loop control; electrostatic actuator; mechanical power; microactuator; position sensor; power performance; propulsive force; stacked actuator; variable capacitance motor; Conductive films; Electrodes; Electromagnetic devices; Electromagnetic forces; Electrostatic actuators; Force sensors; Machinery; Pneumatic actuators; Stators; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE

Conference_Location

Travemunde

Print_ISBN

0-7803-0497-7

Type

conf

DOI

10.1109/MEMSYS.1992.187702

Filename

187702