Theoretical and experimental results of an electrostatic micro motor with large gear ratio fabricated by the LIGA process

Author

Wallrabe, U. ; Bley, P. ; Krevet, B. ; Menz, W. ; Mohr, J.

Author_Institution

Kernforschungszentrum Karlsruhe, Inst. fur Mikrostrukturtechnik, Germany

fYear

1992

fDate

4-7 Feb 1992

Firstpage

139

Lastpage

140

Abstract

It is known that the extension of the LIGA process by a sacrificial layer technique allows the fabrication of movable microstructures with great structural height without the need to assemble individual components. With this technique an electrostatic stepping micro motor has been fabricated and tested. The design of the motor has been optimized with regard to large torque by finite-element-method calculations. The radii of the rotor and the axle have been adjusted to the step width of the motor in order to realize a rolling movement of the rotor on the axle, which minimizes the friction

Keywords

X-ray lithography; electrostatic devices; finite element analysis; micromechanical devices; stepping motors; LIGA process; X-ray lithography; electrostatic micro motor; finite-element-method; large gear ratio; large torque; micromachining; movable microstructures; optimized; sacrificial layer technique; stepping micro motor; Assembly; Axles; Design optimization; Electrostatics; Fabrication; Micromotors; Microstructure; Rotors; Testing; Torque;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE

Conference_Location

Travemunde

Print_ISBN

0-7803-0497-7

Type

conf

DOI

10.1109/MEMSYS.1992.187705

Filename

187705