Title :
Microelectromechanical tuning of electrooptic devices
Author :
Hung, C.y. ; Burton, R. ; Schlesinger, T.E. ; Reed, M.L. ; Smith, S.C. ; Holmgren, D.J. ; Burnham, R.D.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
The wavelengths of separate-confinement quantum-well heterostructure semiconductor lasers have been tuned by applying mechanical stress through a piezoelectric transducer. In addition, photoluminescence measurements have been made on GaAs samples stressed with piezoelectric bimorphs. It is shown that measurable shifts in the energy gap can be obtained by mechanically stressing the semiconductor with a microelectromechanical system (MEMS) transducer. The authors demonstrate MEMS-induced wavelength tuning with four independent phenomena: photoluminescence, photoresponse, lasing, and electroluminescence
Keywords :
electro-optical devices; electroluminescence; gallium arsenide; laser tuning; mechatronics; micromechanical devices; photoluminescence; piezoelectric transducers; semiconductor lasers; GaAs samples; MEMS-induced wavelength tuning; electroluminescence; independent phenomena; lasing; mechanical stress; microelectromechanical system; photoluminescence; photoluminescence measurements; photoresponse; piezoelectric bimorphs; piezoelectric transducer; quantum-well heterostructure semiconductor lasers; separate confinement lasers; stress tuning; tuning of electrooptic devices; wavelength tuning; Electrooptic devices; Gallium arsenide; Laser tuning; Lasers and electrooptics; Photoluminescence; Piezoelectric transducers; Quantum well lasers; Semiconductor lasers; Stress measurement; Wavelength measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE
Conference_Location :
Travemunde
Print_ISBN :
0-7803-0497-7
DOI :
10.1109/MEMSYS.1992.187709
