Helical microstructures grown by laser assisted chemical vapor deposition

Author

Boman, Mats ; Westberg, Helena ; Johansson, Stefan ; Schweitz, Jan-Ake

Author_Institution

Uppsala Univ., Sweden

fYear

1992

fDate

4-7 Feb 1992

Firstpage

162

Lastpage

167

Abstract

It is reported that laser-assisted chemical vapor deposition (LCVD) was used for growth in free space of microscale rods and helical structures of silicon. Using a newly developed rotable goniometer stage, the LCVD technique was also used for fabrication of a tungsten coil on a cylindrical silicon substrate, i.e. a simple microsolenoid was realized. The microstructure of the silicon deposits was investigated by cross-sectional transmission electron microscopy (TEM), and their mechanical strength was evaluated by micromechanical testing in situ in an SEM. The resistivity of the tungsten coil is measured, and the magnetic properties of the microsolenoid are investigated by means of SQUID equipment

Keywords

chemical vapour deposition; coils; laser deposition; mechatronics; micromechanical devices; tungsten; SQUID equipment; Si cylindrical substrate; Si rods; Si-W; W coil; cross-sectional transmission electron microscopy; helical microstructures; laser assisted chemical vapor deposition; magnetic properties; mechanical strength; microcoils; micromechanical testing; microsolenoid; rotable goniometer stage; Chemical lasers; Chemical vapor deposition; Coils; Goniometers; Microstructure; Optical device fabrication; Scanning electron microscopy; Silicon; Structural rods; Tungsten;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE

Conference_Location

Travemunde

Print_ISBN

0-7803-0497-7

Type

conf

DOI

10.1109/MEMSYS.1992.187711

Filename

187711