Title :
E-beam induced fabrication of microstructures
Author :
Brünger, W.H. ; Kohlmann, K.T.
Author_Institution :
Fraunhofer-Inst. fuer Mikrostrukturtech., Berlin, Germany
Abstract :
E-beam-induced deposition of metal from a metal organic gas has been used for the formation of microstructures of various geometries. Three examples, line deposition, needle growth and bridge formation, have been selected for demonstration. Important parameters of the tungsten (W) deposition process from W(CO)6 gas, such as minimum feature size, positional accuracy and growth rate, are given
Keywords :
chemical vapour deposition; electron beam deposition; micromechanical devices; nanotechnology; tungsten; E-beam-induced deposition of metal; W deposition; W(CO)6 gas; bridge formation; growth rate; line deposition; microstructure fabrication; minimum feature size; needle growth; positional accuracy; Bridges; Chemical elements; Electron beams; Fabrication; Fluid flow; Geometry; Microstructure; Needles; Particle beam optics; Scanning electron microscopy;
Conference_Titel :
Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE
Conference_Location :
Travemunde
Print_ISBN :
0-7803-0497-7
DOI :
10.1109/MEMSYS.1992.187712
