• DocumentCode
    2923688
  • Title

    E-beam induced fabrication of microstructures

  • Author

    Brünger, W.H. ; Kohlmann, K.T.

  • Author_Institution
    Fraunhofer-Inst. fuer Mikrostrukturtech., Berlin, Germany
  • fYear
    1992
  • fDate
    4-7 Feb 1992
  • Firstpage
    168
  • Lastpage
    170
  • Abstract
    E-beam-induced deposition of metal from a metal organic gas has been used for the formation of microstructures of various geometries. Three examples, line deposition, needle growth and bridge formation, have been selected for demonstration. Important parameters of the tungsten (W) deposition process from W(CO)6 gas, such as minimum feature size, positional accuracy and growth rate, are given
  • Keywords
    chemical vapour deposition; electron beam deposition; micromechanical devices; nanotechnology; tungsten; E-beam-induced deposition of metal; W deposition; W(CO)6 gas; bridge formation; growth rate; line deposition; microstructure fabrication; minimum feature size; needle growth; positional accuracy; Bridges; Chemical elements; Electron beams; Fabrication; Fluid flow; Geometry; Microstructure; Needles; Particle beam optics; Scanning electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE
  • Conference_Location
    Travemunde
  • Print_ISBN
    0-7803-0497-7
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1992.187712
  • Filename
    187712
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2923688