Process improvements for large area polycrystalline silicon buried contact solar cell sequence

Author

Narayanan, S. ; Creager, J. ; Roncin, S. ; Rohatgi, A. ; Chen, Z.

Author_Institution

Solarex Corp., Frederick, MD, USA

Volume

2

fYear

1994

fDate

5-9 Dec 1994

Firstpage

1319

Abstract

One of the objectives of ongoing research at Solarex is to evolve process sequences that are compatible with high volume production, while reducing the processing cost of buried contact cells. In the paper, the impact of phosphorus gettering and the application of an antireflection coating with a higher refractive index than that of SiO₂ are discussed. Substantial improvement in the efficiency of the buried contact cells due to phosphorus gettering and incorporation of titanium dioxide antireflection coating is reported

Keywords

antireflection coatings; elemental semiconductors; getters; optical films; semiconductor materials; semiconductor thin films; silicon; solar cells; titanium compounds; Si; Si solar cells; Solarex; TiO₂; TiO₂ antireflection coating; cost reduction; efficiency improvement; high volume production; phosphorus gettering; polycrystalline silicon buried contact solar cell; refractive index; Coatings; Contacts; Costs; Etching; Gettering; Photovoltaic cells; Production; Refractive index; Silicon; Thermal spraying;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Energy Conversion, 1994., Conference Record of the Twenty Fourth. IEEE Photovoltaic Specialists Conference - 1994, 1994 IEEE First World Conference on

Conference_Location

Waikoloa, HI

Print_ISBN

0-7803-1460-3

Type

conf

DOI

10.1109/WCPEC.1994.520189

Filename

520189