Title :
Linear and rotational magnetic micromotors fabricated using silicon technology
Author :
Wagner, B. ; Kreutzer, M. ; Benecke, W.
Author_Institution :
Fraunhofer-Inst. fuer Mikrostrukturtech., Berlin, Germany
Abstract :
Different types of sliding, rolling, or rotating micromotors with rare-earth-based permanent magnet rotors are presented. The magnets move synchronously with rotating or traveling magnetic fields generated by 25-μm-thick gold current lines on silicon substrates. The magnets are guided in channels or openings in the silicon itself or in additional glass layers. For magnets with a typical dimension of 1 mm, forces and torques of 150 μN and 100 nNm were achieved. Maximum velocities of 24 cm/s and 2000 r.p.m. have been measured. Magnetic clamping to the bottom confines the rotor to the system and allows motor operation at any tilt angle. The noncontact magnetic transmission of forces to drive a ferromagnetic fluid has been demonstrated
Keywords :
linear motors; mechatronics; micromechanical devices; permanent magnet motors; 1 mm; 240 mm/s; 25 micron; Au lines; Si substrates; Si technology; current lines; dimension; fabrication; ferromagnetic fluid; forces; guided magnets; linear micromotors; magnetic clamping; magnetic micromotors; magnetic transmission of forces; motor operation; rare-earth-based permanent magnet rotors; rotating micromotors; tilt angle; torques; traveling magnetic fields; velocities; Glass; Gold; Magnetic confinement; Magnetic fields; Micromagnetics; Micromotors; Permanent magnets; Rotors; Silicon; Synchronous generators;
Conference_Titel :
Micro Electro Mechanical Systems, 1992, MEMS '92, Proceedings. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robot. IEEE
Conference_Location :
Travemunde
Print_ISBN :
0-7803-0497-7
DOI :
10.1109/MEMSYS.1992.187715
