• DocumentCode
    2924053
  • Title

    Electrical and structural properties of the Si/C interface in poly-Si thin films on graphite substrates [for PV cells]

  • Author

    Reindl, T. ; Krühler, W. ; Pauli, M. ; Müller, J.

  • Author_Institution
    Corp. Res. & Dev., Siemens AG, Munich, Germany
  • Volume
    2
  • fYear
    1994
  • fDate
    5-9 Dec 1994
  • Firstpage
    1406
  • Abstract
    For the first time the Si/C interface in poly-Si photovoltaic thin films on graphite substrate is described. The isostatically pressed graphite is covered with a 3-5 μm thick amorphous silicon layer which is recrystallized by the ZMR method (zone melting recrystallization by means of a line electron beam). During ZMR the molten silicon penetrates into the graphite pores, while at the interface β-SiC particles with a size of 50-1000 nm were formed (TEM, SEM analysis). Furthermore there exists a “reaction zone” where Si, SiC and C are found by electron diffraction. As a consequence the poly-Si layer shows an excellent adhesion to the substrate. Since there is no continuous electrically insulating SiC layer formed, highly boron doped seed layers show an ohmic contact to the graphite. The investigated poly-Si thin films on graphite substrate offer a great potential for photovoltaic application after epitaxy up to 50 μm by LPE or CVD
  • Keywords
    elemental semiconductors; liquid phase epitaxial growth; plasma CVD; plasma CVD coatings; semiconductor device testing; semiconductor growth; semiconductor thin films; silicon; solar cells; substrates; vapour phase epitaxial growth; zone melting; zone melting recrystallisation; 3 to 5 mum; 50 mum; 50 to 1000 nm; C; CVD; LPE; Ohmic contact; Si; Si-C; adhesion; application; electrical properties; epitaxy; graphite substrate; line electron beam; photovoltaic thin films; polycrystalline semiconductor; reaction zone; solar cell; structural properties; zone melting recrystallization; Adhesives; Amorphous silicon; Dielectrics and electrical insulation; Diffraction; Electron beams; Photovoltaic systems; Semiconductor thin films; Silicon carbide; Solar power generation; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Energy Conversion, 1994., Conference Record of the Twenty Fourth. IEEE Photovoltaic Specialists Conference - 1994, 1994 IEEE First World Conference on
  • Conference_Location
    Waikoloa, HI
  • Print_ISBN
    0-7803-1460-3
  • Type

    conf

  • DOI
    10.1109/WCPEC.1994.520211
  • Filename
    520211