Title :
Investigation of lift-off layer in Spindt cathode fabrication
Author :
Li, Xinghui ; Bai, Guodong ; Li, Hanyan ; Ding, Mingqing ; Feng, Jinjun ; Liao, Fujiang
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Vacuum Electron., Beijing Vacuum Electron. Res. Inst., Beijing, China
Abstract :
Some lift-off materials for Spindt cathode fabricating were investigated. Water-soluble materials such as sodium chloride and sodium carbonate make a very fast removing process but cause rough and irregular emitters. An etching technique for heated aluminum oxide lift-off film was suggested to obtain good cone emitters and easy etching process.
Keywords :
aluminium compounds; cathodes; etching; AlO; cone emitters; etching technique; heated aluminum oxide lift-off film; irregular emitters; lift-off layer materials; sodium carbonate; sodium chloride; spindt cathode fabrication; water-soluble materials; Aluminum oxide; Cathodes; Etching; Films; Logic gates; Silicon; Spindt cathode; aluminum oxide; lift-off layer; selective etching; water-soluble material;
Conference_Titel :
Vacuum Electron Sources Conference (IVESC), 2012 IEEE Ninth International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4673-0368-2
DOI :
10.1109/IVESC.2012.6264184
