Title :
A tunable subwavelength resonant grating optical filter
Author :
Tan, Hua ; Chang, Allan S.P. ; Wu, Wei ; Yu, Zhaoning ; Bai, Shufeng ; Chou, Stephen Y.
Author_Institution :
Dept. of Electr. Eng., Princeton Univ., NJ, USA
Abstract :
A tunable subwavelength resonant grating (SRG) filter with liquid crystal cladding as the tuning layer has been demonstrated for the first time. The filter can be easily fabricated by nanoimprint lithography (NIL). NIL has the advantage of low-cost, high-throughput, and sub-10 nm resolution. The filter has a 17 nm tuning range, which is at least 20 times wider than any previous SRG filter, and 2 nm FWHM. The potential for monolithic integration on a chip, easy fabrication, and low cost will make SRG filter an important element for future WDM optical telecommunication.
Keywords :
claddings; diffraction gratings; electro-optical filters; liquid crystal devices; nanolithography; optical fabrication; optical tuning; optical waveguide filters; FWHM; WDM optical telecommunication; chip; easy fabrication; high-throughput; liquid crystal cladding; low-cost; monolithic integration; nanoimprint lithography; sub-10 nm resolution; tunable subwavelength resonant grating optical filter; tuning layer; tuning range; Costs; Gratings; Liquid crystals; Monolithic integrated circuits; Nanolithography; Optical device fabrication; Optical filters; Optical tuning; Resonance; Wavelength division multiplexing;
Conference_Titel :
Lasers and Electro-Optics Society, 2002. LEOS 2002. The 15th Annual Meeting of the IEEE
Print_ISBN :
0-7803-7500-9
DOI :
10.1109/LEOS.2002.1159562
