• DocumentCode
    2925947
  • Title

    Low Temperature Molding for High Space Coverage Microlens Arrays

  • Author

    Wang, Kerwin ; Bohringer, Karl F.

  • Author_Institution
    Electrical Engineering Department, University of Washington, USA kerwin@ee.washington.edu
  • fYear
    2005
  • fDate
    30-02 Aug. 2005
  • Firstpage
    1291
  • Lastpage
    1292
  • Abstract
    This paper presents SF6/O2plasma lens-mold-etching and low-temperature-molding to produce 100% coverage microlens arrays. The methods can successfully fabricate microlenses with different focal lengths (432.7-826.5μm) on a substrate in batch processes.
  • Keywords
    Lenses; Materials testing; Microoptics; Optical distortion; Optical materials; Optical refraction; Optical variables control; Plasma applications; Plasma displays; Plasma temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
  • Print_ISBN
    0-7803-9242-6
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2005.1569726
  • Filename
    1569726
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2925947