• DocumentCode
    2926286
  • Title

    Piezoelectric micro-actuators for RF-MEMS switches

  • Author

    Kanno, Isaku ; Endo, Hironobu ; Suzuki, Takaaki ; Kotera, Hidetoshi

  • Author_Institution
    Kyoto University, Japan
  • fYear
    2005
  • fDate
    30-02 Aug. 2005
  • Firstpage
    1380
  • Lastpage
    1381
  • Abstract
    We have developed piezoelectric micro-actuators for the application of low-voltage RF-MEMS switches. The micro-cantilevers are composed of piezoelectric PZT thin films deposited on Pt/Ti/Si substrates by rf-magnetron sputtering. The PZT thin films are microfabricated into a unimorph cantilever with the length of 500 μm and the width of 85 μm. We could obtain large tip deflection of 1.0 μm even at the voltage of 5.0V. This result suggests that the low-voltage RF-MEMS switches are expected to be realiezed using piezoelectric PZT thin film actuators.
  • Keywords
    Chromium; Microactuators; Microswitches; Piezoelectric films; Radiofrequency microelectromechanical systems; Semiconductor films; Sputtering; Substrates; Switches; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
  • Print_ISBN
    0-7803-9242-6
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2005.1569744
  • Filename
    1569744
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2926286