Design of a MEMS-based, 3-axis accelerometer smart sensor

Author

Tieman, Jeffrey ; Schmalzel, John ; Krchnavek, Robert

Author_Institution

Naval Air Warfare Center, Lakehurst, NJ, USA

fYear

2002

fDate

19-21 Nov. 2002

Firstpage

19

Lastpage

23

Abstract

Accelerometers are used for a number of physical measurements in aerospace, defense, automotive, household appliances, instrumentation, transport, material handling, etc. Recently micro-electromechanical system (MEMS) technologies have been used to manufacture accelerometers. MEMS sensors include transducer elements and the necessary signal conditioning electronics integrated together on a single integrated circuit (IC). This paper describes the design of a low-cost, compact MEMS-based smart sensor system for 3-axis acceleration measurement using only commercial off the shelf (COTS) components.

Keywords

accelerometers; intelligent sensors; microsensors; COTS component; MEMS technology; accelerometer smart sensor; integrated circuit; signal conditioning electronics; three-axis acceleration measurement; transducer element; Accelerometers; Aerospace electronics; Aerospace materials; Automotive engineering; Home appliances; Instruments; Integrated circuit measurements; Intelligent sensors; Materials handling; Micromechanical devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors for Industry Conference, 2002. 2nd ISA/IEEE

Print_ISBN

1-55617-834-4

Type

conf

DOI

10.1109/SFICON.2002.1159799

Filename

1159799