Surface-micromachined confocal scanning optical microscope

Author

Piyawattanametha, W. ; Toshiyoshi, H. ; LaCosse, J. ; Wu, M.C.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

fYear

2000

fDate

7-12 May 2000

Firstpage

447

Lastpage

448

Abstract

Summary form only given.The confocal scanning microscope (CSM) can create high-resolution three-dimensional (3D) images of thick and light-scattering objects from successive acquisition of 2D images through its optical sectioning property. This capability allows us to develop a micro-optical-endoscope for high-quality in vivo imaging of living tissue. The microelectromechanical system (MEMS) approach has shown great promise to produce miniaturized CSMs by batch fabrication. We propose a novel surface micromachined 2D scanner to extend the performance of CSMs. This microscope is called surface-micromachined confocal scanning optical microscope (CSOM).

Keywords

biomedical equipment; biomedical imaging; micro-optics; micromachining; micromechanical devices; optical microscopes; optical scanners; 2D images; MEMS; batch fabrication; confocal scanning microscope; high-resolution 3D images; in vivo imaging; light-scattering objects; living tissue; micro-optical-endoscope; microelectromechanical system; miniaturized CSMs; optical sectioning property; surface micromachined 2D scanner; surface-micromachined confocal scanning optical microscope; Biomedical optical imaging; Jitter; Lenses; Light scattering; Microsensors; Optical coupling; Optical microscopy; Optical scattering; Optical surface waves; Solid state circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 2000. (CLEO 2000). Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

1-55752-634-6

Type

conf

DOI

10.1109/CLEO.2000.907232

Filename

907232