Title :
Development of Visualization System of Neutral Particles Generated from Laser-Produced Plasma for EUV Light Source
Author :
Matsumoto, Atsushi ; Tanaka, Hiroki ; Akinaga, Kouji ; Takahashi, Akihiko ; Okada, Tatsuo
Author_Institution :
Kyushu University, Japan matumoto@laserlab.ees.kyushu-u.ac.jp
Abstract :
In order to understand the behavior of neutral particles in laser-produced plasmas used for the extreme ultraviolet light source, we have been developing a visualization system of neural particles by means of planar Rayleigh scattering and planar laser-induced fluorescence spectroscopy (LIF). Based on the measurement, influence of EUV light absorption and kinetics of Sn plasma are discussed.
Keywords :
Electromagnetic wave absorption; Fluorescence; Kinetic theory; Light sources; Plasma measurements; Plasma sources; Rayleigh scattering; Spectroscopy; Ultraviolet sources; Visualization;
Conference_Titel :
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN :
0-7803-9242-6
DOI :
10.1109/CLEOPR.2005.1569794
