DocumentCode
2927199
Title
Development of Visualization System of Neutral Particles Generated from Laser-Produced Plasma for EUV Light Source
Author
Matsumoto, Atsushi ; Tanaka, Hiroki ; Akinaga, Kouji ; Takahashi, Akihiko ; Okada, Tatsuo
Author_Institution
Kyushu University, Japan matumoto@laserlab.ees.kyushu-u.ac.jp
fYear
2005
fDate
30-02 Aug. 2005
Firstpage
1500
Lastpage
1501
Abstract
In order to understand the behavior of neutral particles in laser-produced plasmas used for the extreme ultraviolet light source, we have been developing a visualization system of neural particles by means of planar Rayleigh scattering and planar laser-induced fluorescence spectroscopy (LIF). Based on the measurement, influence of EUV light absorption and kinetics of Sn plasma are discussed.
Keywords
Electromagnetic wave absorption; Fluorescence; Kinetic theory; Light sources; Plasma measurements; Plasma sources; Rayleigh scattering; Spectroscopy; Ultraviolet sources; Visualization;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN
0-7803-9242-6
Type
conf
DOI
10.1109/CLEOPR.2005.1569794
Filename
1569794
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