DocumentCode :
2927284
Title :
9.4: MEMS fabrication of 0.22 THz sheet beam TWT circuit
Author :
Shin, Young-Min ; Baig, Anisullah ; Gamzina, Diana ; Luhmann, Neville C., Jr.
Author_Institution :
Dept. of Appl. Sci., Univ. of California - Davis (UCD), Davis, CA, USA
fYear :
2010
fDate :
18-20 May 2010
Firstpage :
185
Lastpage :
186
Abstract :
0.22 THz sheet beam traveling wave tube amplifier (TWTA) circuits fabricated by microelectro mechanical system (MEMS) processes are under investigation for submillimeter wave applications. Currently, we are investigating three different methods; KMPR UV-LIGA and nano CNC machining. Eigenmode transient simulations show that, accounting for realistic values of our currently achievable fabrication tolerances, the transmission, and dispersion properties of the operation modes of a TE-mode, staggered, double grating circuit are maintained within less than 1 dB and 2% deviation, respectively. Scanning electron microscopy and atomic force microscopy analyses of the fabricated circuit samples demonstrate that both of the MEMS fabrication approaches produce circuits with ± 3 - 5 μm dimensional tolerance and ~ 30 nm surface roughness. Currently, the fabricated circuits are being cold-tested and process conditions will be re-adjusted with respect to a test result for optimization.
Keywords :
micromachining; micromechanical devices; travelling wave amplifiers; travelling wave tubes; KMPR UV-LIGA; MEMS fabrication; atomic force microscopy; double grating circuit; eigenmode transient simulation; frequency 0.22 THz; microelectro mechanical system; nano CNC machining; scanning electron microscopy; sheet beam TWT circuit; sheet beam traveling wave tube amplifier circuits; submillimeter wave application; Atomic force microscopy; Circuit testing; Computer numerical control; Fabrication; Mechanical systems; Micromechanical devices; Scanning electron microscopy; Submillimeter wave circuits; Submillimeter wave devices; Submillimeter wave propagation; KMPR; LIGA; MEMS; THz; TWTA; sheet beam; submillimeter;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2010 IEEE International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4244-7098-3
Type :
conf
DOI :
10.1109/IVELEC.2010.5503542
Filename :
5503542
Link To Document :
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