Title :
P1–38: Study on real-time measurement of pressure inside field emission displays
Author :
Yunkang Cui ; Zhang, Xiaobing ; Lei, Wei ; Di, Yunsong ; Xiao, Mei
Author_Institution :
Sch. of Electron. Sci. & Eng., Southeast Univ., Nanjing, China
Abstract :
A novel sealing structure is proposed to make in situ measurement of pressure for nondestructive. A small gauge, consisting of a cathode (carbon nanotubes field emitter arrays), a grid, and a collector, is sealed together with FEDs. The gauge is analogous to a conventional hot cathode ionization gauge but has a cold cathode (CNT). This gauge is calibrated in an ultra-high vacuum (UHV) system with known gas pressure. We also used the new sealing structure to real-time measurement of the pressure inside fully sealed FEDs (5 in. × 5 in.) and document the correlation between the field emitting current and the pressure inside the vacuum package.
Keywords :
carbon nanotubes; cathodes; field emitter arrays; pressure gauges; pressure measurement; carbon nanotubes field emitter arrays; cold cathode; collector; field emission displays; grid; hot cathode ionization gauge; pressure measurement; real-time measurement; sealing structure; ultra-high vacuum system; Area measurement; Carbon nanotubes; Cathodes; Current measurement; Diodes; Electron emission; Flat panel displays; Packaging; Pressure measurement; Voltage; Carbon nanotube; Field emission displays; Pressure;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2010 IEEE International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4244-7098-3
DOI :
10.1109/IVELEC.2010.5503545