Title :
Electrodeposition of magnetic coatings for a magnetoelastic strain sensor
Author :
Toth, Lou ; Biter, William J.
Author_Institution :
Tokusen USA Inc., USA
Abstract :
The goal of this work is to develop inexpensive strain sensors by electrodepositing "strain sensitive" magnetic thin films on polycrystalline copper wires. This paper will discuss the fabrication of the stress sensitive wires. A direct current, galvanostatic electrodeposition process, utilizing an aqueous sulfate-chloride electrolyte, was used to deposit the soft-magnetic, NiFe alloy thin films onto 0.125-mm diameter wires. This current investigation focused on elucidating the deposition parameters required for obtaining suitable NiFe thin films. A photolithographic technique was used for masking the wires and selectively depositing the NiFe films. Electrodeposition parameters were established that yielded extremely fine crystallites that were strain sensitive in the operational load range intended for the sensors.
Keywords :
electrodeposition; iron alloys; magnetic sensors; magnetic thin film devices; magnetoelastic effects; nickel alloys; soft magnetic materials; strain sensors; Cu; NiFe; galvanostatic electrodeposition; magnetic coating; magnetoelastic strain sensor; photolithographic technique; polycrystalline copper wire; soft magnetic NiFe alloy thin film; Capacitive sensors; Coatings; Copper; Fabrication; Magnetic field induced strain; Magnetic films; Magnetic sensors; Sputtering; Thin film sensors; Wires;
Conference_Titel :
Sensors for Industry Conference, 2002. 2nd ISA/IEEE
Print_ISBN :
1-55617-834-4
DOI :
10.1109/SFICON.2002.1159821