DocumentCode
2927335
Title
Electrodeposition of magnetic coatings for a magnetoelastic strain sensor
Author
Toth, Lou ; Biter, William J.
Author_Institution
Tokusen USA Inc., USA
fYear
2002
fDate
19-21 Nov. 2002
Firstpage
125
Lastpage
126
Abstract
The goal of this work is to develop inexpensive strain sensors by electrodepositing "strain sensitive" magnetic thin films on polycrystalline copper wires. This paper will discuss the fabrication of the stress sensitive wires. A direct current, galvanostatic electrodeposition process, utilizing an aqueous sulfate-chloride electrolyte, was used to deposit the soft-magnetic, NiFe alloy thin films onto 0.125-mm diameter wires. This current investigation focused on elucidating the deposition parameters required for obtaining suitable NiFe thin films. A photolithographic technique was used for masking the wires and selectively depositing the NiFe films. Electrodeposition parameters were established that yielded extremely fine crystallites that were strain sensitive in the operational load range intended for the sensors.
Keywords
electrodeposition; iron alloys; magnetic sensors; magnetic thin film devices; magnetoelastic effects; nickel alloys; soft magnetic materials; strain sensors; Cu; NiFe; galvanostatic electrodeposition; magnetic coating; magnetoelastic strain sensor; photolithographic technique; polycrystalline copper wire; soft magnetic NiFe alloy thin film; Capacitive sensors; Coatings; Copper; Fabrication; Magnetic field induced strain; Magnetic films; Magnetic sensors; Sputtering; Thin film sensors; Wires;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors for Industry Conference, 2002. 2nd ISA/IEEE
Print_ISBN
1-55617-834-4
Type
conf
DOI
10.1109/SFICON.2002.1159821
Filename
1159821
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