DocumentCode
2928508
Title
Laser microfabrication of photoresist rod array using a microlens array
Author
Matsuo, Shigeki ; Miyamoto, Takashi ; Tomita, Takuro
Author_Institution
The University of Tokushima, Japan; matsuos@eco.tokushima-u.ac.jp
fYear
2005
fDate
30-02 Aug. 2005
Firstpage
1731
Lastpage
1732
Abstract
Simultaneous fabrication of periodically arranged rods of photoresist with an aspect ratio of about 15 was carried out by femtosecond laser processing using a microlens array.
Keywords
Lenses; Microoptics; Optical arrays; Optical device fabrication; Optical films; Optical pulses; Resists; Scanning electron microscopy; Substrates; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2005. CLEO/Pacific Rim 2005. Pacific Rim Conference on
Print_ISBN
0-7803-9242-6
Type
conf
DOI
10.1109/CLEOPR.2005.1569869
Filename
1569869
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