DocumentCode
2928725
Title
Mechanisms of retention loss in Ge2 Sb2 Te5 -based Phase-Change Memory
Author
Shih, Y.H. ; Wu, J.Y. ; Rajendran, B. ; Lee, M.H. ; Cheek, R. ; Lamorey, M. ; Breitwisch, M. ; Zhu, Y. ; Lai, E.K. ; Chen, C.F. ; Stinzianni, E. ; Schrott, A. ; Joseph, E. ; Dasaka, R. ; Raoux, S. ; Lung, H.L. ; Lam, C.
fYear
2008
fDate
15-17 Dec. 2008
Firstpage
1
Lastpage
4
Abstract
Data retention loss from the amorphous (RESET) state over time in Phase-Change Memory cells is associated with spontaneous crystallization. In this paper, the change in the threshold voltage (VT) of memory cells in the RESET state before and after heating is used as a probe into the nature of the retention loss mechanisms. Two mechanisms for the retention loss behavior are identified, responsible for the main distribution and the tail distribution, respectively. Experimental results suggest that (i) an optimized RESET operation produces a fully amorphized Ge2Sb2Te5 (aGST) active region, with no crystalline domains inside, (ii) cells in the tail distribution fail to retain their RESET state due to spontaneous generation of crystallization nuclei and grain growth, and (iii) cells in the main distribution fail due to grain growth from the amorphous/crystalline GST boundary, instead of nucleation within the active region.
Keywords
amorphous semiconductors; antimony compounds; crystallisation; germanium compounds; phase change memories; Ge2Sb2Te5; RESET state; amorphous state; crystallization; phase-change memory; retention loss mechanism; Amorphous materials; Breakdown voltage; Crystallization; Grain boundaries; Heating; Phase change memory; Phase change random access memory; Probability distribution; Tail; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 2008. IEDM 2008. IEEE International
Conference_Location
San Francisco, CA
ISSN
8164-2284
Print_ISBN
978-1-4244-2377-4
Electronic_ISBN
8164-2284
Type
conf
DOI
10.1109/IEDM.2008.4796653
Filename
4796653
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