DocumentCode
2929281
Title
High-precision method for gauge block measurements and comparison of gauge block interferometers
Author
Malinovsky, I. ; Titov, A. ; Massone, C.A.
Author_Institution
INMETRO, Rio de Janeiro, Brazil
fYear
1998
fDate
6-10 July 1998
Firstpage
50
Lastpage
51
Abstract
A precise method, intended for nanometer accuracy in gauge block length measurements, has been realized. Results of the measurements are corrected on distortions in interferometer optics and are not affected by the quality of wringing and deformation of the reference plate. Accuracy limitations of the conventional method are outlined.
Keywords
calibration; length measurement; light interferometers; measurement standards; measurement uncertainty; SI length unit; accuracy limitations; distortions in interferometer optics; error elimination; gauge block interferometers; gauge block measurements; high-precision method; length measurement; nanometer accuracy; uncertainty; Coordinate measuring machines; Distortion measurement; Interferometers; Lab-on-a-chip; Length measurement; Mechanical variables measurement; Optical distortion; Optical interferometry; Petroleum; Reproducibility of results;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 1998 Conference on
Conference_Location
Washington, DC, USA
Print_ISBN
0-7803-5018-9
Type
conf
DOI
10.1109/CPEM.1998.699770
Filename
699770
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