MEMS-based multiwavelength tunable 2×2 VCSEL array for WDM applications

This paper describes a Multi-Wavelength C-Band Tunable MEMS 2×2-array Vertical Cavity Surface Emitting Laser. Optical detectors, optical filters and Wavelength-tunable lasers play a pivotal role in the future ultrahigh bandwidth dense-wavelength-division-multiplexed (DWDM) optical network, enabling revolutionary new applications such as wavelength-on-demand in a reconfigurable all-optical network. Vertical-cavity Surface-emitting laser (VCSEL) is the key optical source in optical communication. The advantages of VCSEL include simpler fiber coupling, easier packaging and testing, ability to be fabricated in arrays and low cost. The VCSEL array was made to be tunable in C-Band(1520-1550nm) by varying the length of the Fabry Perot(FP) cavity. The FP cavity length is varied by using fixed-fixed beam electrostatic actuation. The VCSEL array is designed on to a single wafer using Intellisuite software and the optical analysis is done by using MATLAB.