Development of plasmonics-active SERS substrates on a wafer scale for chemical and biological sensing applications

Author

Dhawan, Anuj ; Du, Yan ; Wang, Hsinneng ; Leonard, Donovon ; Misra, Veena ; Ozturk, Mehmet ; Gerhold, Michael ; Vo-Dinh, Tuan

Author_Institution

Depts. of BME & Chem., Duke Univ., Durham, NC

fYear

2008

fDate

15-17 Dec. 2008

Firstpage

1

Lastpage

4

Abstract

This paper describes the fabrication of highly efficient plasmonics-active SERS substrates - having metallic nanowire structures with pointed geometries and sub-5 nm gap between the metallic nanowires enabling concentration of high EM fields in these regions - on a wafer-scale by a reproducible process that is compatible with large-scale development of these substrates. These SERS substrates were employed for detecting chemical and biological molecules of interest.

Keywords

biosensors; chemical sensors; nanofabrication; nanophotonics; nanosensors; nanowires; optical sensors; substrates; surface enhanced Raman scattering; surface plasmons; wafer-scale integration; EM fields; biological molecule detection; biological sensing; chemical molecule detection; chemical sensing; large-scale development; metallic nanowire structures; plasmonics-active SERS substrate fabrication; surface-enhanced Raman scattering; wafer scale; Chemicals; Fabrication; Geometry; Germanium silicon alloys; Large-scale systems; Nanobioscience; Nanostructures; Raman scattering; Silicon germanium; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 2008. IEDM 2008. IEEE International

Conference_Location

San Francisco, CA

ISSN

8164-2284

Print_ISBN

978-1-4244-2377-4

Electronic_ISBN

8164-2284

Type

conf

DOI

10.1109/IEDM.2008.4796732

Filename

4796732