• DocumentCode
    2931438
  • Title

    UHF acoustic attenuation and quality parameter limits in the diamond based HBAR

  • Author

    Telichko, Arseniy ; Sorokin, Boris ; Kvashnin, Gennagy

  • Author_Institution
    Moscow Inst. of Phys. & Technol., Dolgoprudny, Russia
  • fYear
    2015
  • fDate
    12-16 April 2015
  • Firstpage
    94
  • Lastpage
    99
  • Abstract
    Ultra high frequency attenuation limits in synthetic IIa diamond single crystal were studied. The investigations were provided by High-overtone Bulk Acoustic Resonator “Al/AlN/Mo/(100) diamond”. It was shown, that the change of Akhiezer´s attenuation regime to Landau-Rumer one takes place at f ≈ 1 GHz. The experimental results on the quality parameter showed Q×f ≈ 1.8·1013 Hz for Akhiezer´s regime, and Q×f ≈ f×1.8·104 Hz for Landau-Rumer regime. As a consequence on a higher frequencies diamond single crystal has more preferred acoustic parameters including a lower acoustic attenuation in comparison with known acoustoelectronic materials.
  • Keywords
    acoustic resonators; aluminium; aluminium compounds; bulk acoustic wave devices; diamond; molybdenum; Akhiezer attenuation regime; Al-AlN-Mo; HBAR; Landau-Rumer regime; UHF acoustic attenuation; acoustoelectronic material; diamond; high-overtone bulk acoustic resonator; quality parameter limit; synthetic IIa diamond single crystal; ultrahigh frequency attenuation limit; Acoustics; Aluminum nitride; Attenuation; Crystals; Diamonds; Frequency dependence; III-V semiconductor materials; AlN; HBAR; Kikuchi lines; UHF; acoustic attenuation; damage layer; diamond;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium & the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International
  • Conference_Location
    Denver, CO
  • Print_ISBN
    978-1-4799-8865-5
  • Type

    conf

  • DOI
    10.1109/FCS.2015.7138799
  • Filename
    7138799