DocumentCode :
2932500
Title :
Theoretical and experimental investigations of resonance frequencies in a microwave heated fluidized bed reactor
Author :
Baysar, A. ; Kuester, J.L. ; El-Ghazaly, S.
Author_Institution :
Arizona State Univ., Tempe, AZ, USA
fYear :
1992
fDate :
1-5 June 1992
Firstpage :
1573
Abstract :
Fluidized bed reactors have great potential for use in high-purity silicon chemical vapor deposition with microwaves as the energy source. The mode tuning characteristics of a fluidized bed reactor were investigated. The lower-order TE and TM mode resonance frequencies were computed and measured as a function of dielectric height for two different samples. The theoretical results were obtained using the transverse resonance method. Good agreement between measured and computed resonance frequencies was obtained. The TE mode resonance frequencies for the lossless alumina sample show a stairstep fall as a function of the dielectric sample height. The TM modes follow a more smoothly decreasing behavior. The results for the lossy silicon sample exhibited a rising stairstep behavior.<>
Keywords :
cavity resonators; chemical vapour deposition; microwaves; radiofrequency heating; resonance; semiconductor technology; tuning; Al/sub 2/O/sub 3/; TE mode; TM mode; chemical vapor deposition; dielectric height; fluidized bed reactor; high purity Si CVD; lossless alumina sample; lossy Si sample; microwave heated; mode tuning characteristics; resonance frequencies; transverse resonance method; Chemical vapor deposition; Dielectric losses; Dielectric measurements; Fluidization; Frequency measurement; Inductors; Resonance; Resonant frequency; Silicon; Tellurium;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Symposium Digest, 1992., IEEE MTT-S International
Conference_Location :
Albuquerque, NM, USA
ISSN :
0149-645X
Print_ISBN :
0-7803-0611-2
Type :
conf
DOI :
10.1109/MWSYM.1992.188317
Filename :
188317
Link To Document :
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