Theoretical and experimental investigations of resonance frequencies in a microwave heated fluidized bed reactor

Fluidized bed reactors have great potential for use in high-purity silicon chemical vapor deposition with microwaves as the energy source. The mode tuning characteristics of a fluidized bed reactor were investigated. The lower-order TE and TM mode resonance frequencies were computed and measured as a function of dielectric height for two different samples. The theoretical results were obtained using the transverse resonance method. Good agreement between measured and computed resonance frequencies was obtained. The TE mode resonance frequencies for the lossless alumina sample show a stairstep fall as a function of the dielectric sample height. The TM modes follow a more smoothly decreasing behavior. The results for the lossy silicon sample exhibited a rising stairstep behavior.<>