A vibrating wheel micromachined gyroscope for commercial and automotive applications

Author

Dong, Yuqian ; Gao, Zhongyu ; Zhang, Rong ; Chen, Zhiyong

Author_Institution

Dept. of Precision Instrum., Tsinghua Univ., Beijing, China

Volume

3

fYear

1999

fDate

1999

Firstpage

1750

Abstract

Vibratory wheel micromachined gyroscopes with electrostatic drive and capacitance detection are presented. The angular rate measurement is performed with an exciting voltage of 10 Vpp(AC) plus 5 V(DC) in atmosphere. Resolution better than 3°/s has been recorded with self-drive oscillation. In this paper, the following topics are covered: the structure and fabrication of the micromachined gyroscopes, the principle of operation, electronics, control systems, sensitivity as well as projected and measured performance. Associated phenomena and further studies also will be addressed. Resolution better than 1°/s to meet the automotive application will be available in the near future

Keywords

automotive electronics; capacitive sensors; gyroscopes; micromachining; microsensors; vibrations; angular rate measurement; automotive applications; capacitance detection; commercial applications; electrostatic drive; self-drive oscillation; vibrating wheel micromachined gyroscope; Atmosphere; Atmospheric measurements; Capacitance; Control systems; Electrostatic measurements; Fabrication; Gyroscopes; Performance evaluation; Voltage; Wheels;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 1999. IMTC/99. Proceedings of the 16th IEEE

Conference_Location

Venice

ISSN

1091-5281

Print_ISBN

0-7803-5276-9

Type

conf

DOI

10.1109/IMTC.1999.776122

Filename

776122