Title :
Micromechanical silicon scale
Author :
Sillanpaa, T. ; Oja, A.S. ; Seppa, H.
Author_Institution :
VTT Autom. Measure. Technol., Espoo, Finland
Abstract :
A novel miniature capacitive scale is described. The device is realized by micromachining single-crystalline silicon. Our design calculations show that it is possible to weigh one gram with an accuracy on the order of a part in million.
Keywords :
capacitive sensors; elemental semiconductors; force feedback; microbalances; micromachining; micromechanical resonators; microsensors; silicon; weighing; Si; design calculations; electrostatic force; force feedback; mass measurement; micromachining; micromechanical resonant frequency; micromechanical silicon scale; miniature capacitive scale; single-crystalline silicon; weight measurement; Electrodes; Electrostatics; Force feedback; Force measurement; Force sensors; Glass; Gravity; Position measurement; Silicon; Vibration measurement;
Conference_Titel :
Precision Electromagnetic Measurements Digest, 1998 Conference on
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-5018-9
DOI :
10.1109/CPEM.1998.699805
